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Air Flow

Final Filter Type

ISO Class

Terra Part # Price Ships in
120 V Handheld Cleanroom Use 5.5 CFM ULPA ISO 5 5100-00 16331 $1,815 1-3 Days 2
Quick Ship+ Only 8 left in stock
240 V Handheld Cleanroom Use 5.5 CFM ULPA ISO 5 5100-00-220 16332 $2,045 1-3 Days 3
Quick Ship+ Only 2 left in stock
Air Flow
Final Filter Type
ISO Class
Item ordered before. Click on bagde to see the order.

Up to 30-day trial periods, free return shipping and on-site training available for qualified equipment.

Request demo from your product specialist or add note to your order or quote request.

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Usually Ships in:
Free shipping in contiguous USA
Custom-configured product. Contact Lab Equip by phone, chat or email for a project-specific quote.
Custom-configured product. Contact Lab Equip by phone, chat or email for a project-specific quote.
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Product Details
Product Details
  • Available ISO Ratings: ISO 5, ISO 6, ISO 7, ISO 8
  • 10-pound, hand-held portable vacuum cleaner ideal for ISO 5-8 cleanrooms
  • Four-stage ULPA filtration system, 99.999% efficient with 0.12 µm particles
  • Cloth bag collects and recovers fine dust powders like Gold and Aluminum
  • Sturdy, stainless steel construction ensures clean and dependable performance
  • Removes fumes, moisture, dust and contaminants from glove boxes or equipment enclosures
  • Applications:
  • Hazardous dust containment for cyanide powder or APIs
  • Precious metal collection, such as Gold or Aluminum dust
  • 3-D printing waste clean-up
  • Fume extraction
  • Chemical spill containment
  • Positive pressure, ULPA-filtered air source for glove boxes
  • Negative pressure source for nitrogen backfilling operations
  • Cleaning tight corners and delicate equipment
  • Large particles are trapped in a disposable bag and a permanent cloth bag during the first and second vacuum stages, and a fine mesh stainless steel screen in stage three, to extend the life of the final ULPA filter
  • Comes complete with a 3' flexible hose, two 20" extension wands, crevice tool, five extra disposable bags, one ULPA Exhaust Filter, Mini-Tool Kit, and carrying case
  • Easy access to bags for replacement

Available ISO Ratings: ISO 5, ISO 6, ISO 7, ISO 8

Unit of Measure: of 1

  • Cleanroom complient vacuum cleaner Watch Terra's MicroVac™ Portable Cleanroom Vacuum Cleaner Video
  • Micro-Vac Vacuum Four-Stage ULPA Filter System Micro-Vac Vacuum Four-Stage ULPA Filter System
Cleanroom complient vacuum cleaner
Features & Benefits

Features and Benefits

Vacuums Chemical Powder Spills

The small, lightweight, and flexible MicroVac mini-tool attachments are optimal for cleaning tight corners, narrow openings and delicate equipment that a larger cleaner can't reach.

Micro-Filtered Air Blower

The MicroVac's 99.999% efficient ULPA filter provides an ultra-clean, high-flow, positive pressure air source for glove boxes and other particle-free, sterile enclosures.

Quickly Evacuates Ambient Air

Terra's MicroVac rapidly evacuates ambient air from glove boxes to allow for backfilling with Nitrogen gas, shortening time to reach setpoint
Available Accessories
Popular Accessories
For a full list of accessories, select a product then click Choose Accessories on that product page.
  • MicroVac Replacement Disposable Paper Bag Filter

    Stage One disposable paper bag for MicroVac portable cleanroom vacuum cleaner helps remove air’s largest particles, increasing the life and efficiency of the ULPA filter. Packaged 5 in a bag.
  • MicroVac Cleanroom Vacuum Replacement ULPA Filters

    Designed for use in the MicroVac portable vacuum as a replacement Stage 4 filter. The glass-fiber ULPA filter removes particles 0.12 microns with 99.999% efficiency, thereby exhausting particle-free air back into the cleanroom.
  • MicroVac Mini-Tool Attachment Kit

    MicroVac Mini-Tool Kit is ideal for computer keyboards, PC boards, and other small parts. Can be attached to either side of the MicroVac, allowing use as a vacuum or a clean-air blower.
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