Silicon Nitride/Oxide Etcher, Nb Series; 11.5"W x 7.5"D x 7.8"L
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• Dimensions: 11.5"W x 7.5"D x 7.8"L
• Material: Polypropylene
• Power: 200/ 60Hz
• One piece seamless quartz vessel is 99.997% contamination and boron-free
• DI metering valve precisely controls water drip rate
• DI pressure regulator eliminates pressure fluctuations that disrupt processing
• Allows safe etching of silicon nitride layers
• Requires C1815aLSS process controller at additional $1,699.00 (cat.# 7018-36)
• Electrical Specifications: None
• Weight, Shipping: 30 lb
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