Summary

  • Dimensions of vessel ID: 12"W x 11"D x 11.7"L
  • Material: Polypropylene
  • Power:    200V/60Hz
  • One piece seamless quartz vessel is 99.997% contamination and boron-free
  • DI metering valve controls water drip rate
  • DI pressure regulator eliminates pressure fluctuations
  • Allows safe etching of silicon nitride layers
  • Requires C1815aLSS process controller at additional $1,699.00 (cat.# 7018-36)

Specifications

Helena

Electrical Specifications: None

Weight, Shipping: 30 lb

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