Summary

  • Ideal for DI (deionized) rinsing of wafers, masks, reticles and other semiconductor devices.
  • Innovative process capabilities include programmable initial and nitrogen bubbles and DI spray jets
  • From below.
  • All poylypropylene/PDF surfaces and semiconductor-grade "Ultra-Clean" DI water valves ensure a
  • Clean, safe processing environment.
  • Comes complete with retractable PVC cover and all necessary parts and fittings (guaranteed for one
  • Year)
  • G.  Electrical Service: 105/125Vac, single phase, 50/60HZ.
  • Page 536 for pricing and information) provides multiple program
  • Adjustments and end-of-cycle alarm.

Specifications

Helena

Electrical Specifications: 120 V, 1 Ph, 60 Hz

Weight, Product: 10 lb

Dimensions, Product: 15.9" W x 10" D x 13.3" H

Weight, Shipping: 15 lb

Dimensions, Shipping: 20" W x 12" D x 15" H

Package Type: Box

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