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Class 100 Cleanroom Ovens

Class 100 Cleanroom Ovens
Maximum Temperature: 250°C
Class 100 Cleanroom Ovens are designed specifically for cleanroom operation and are ideal for use in semiconductor and electronics applications. Model without filter meets the requirements of Fed. Std. 209E for a Class 100 (ISO 5) environment, and Oven with HEPA filter exceeds Class 100 conditions.
  • Model with HEPA Filter (#3700-70) maintains Class 100 particle requirements
  • Model without HEPA Filter (#3700-12) exceeds Class 100 air standards
  • Temperature range of ambient +5°C to 250°C
  • Single-program PID microprocessor controller
  • Safety features protect samples against overheating and maintenance of even temperature in the event of microprocessor failure
  • Adjustable ports with 2" (4.40 mm) diameter
  • Material: white powder-coated steel exterior and stainless steel interior for cleanroom compliance
  • 3" (76.2 mm) silica-based insulation
  • Ideal for use in semiconductor and electronics applications
  • 24-month warranty

Class 100 Cleanroom Oven Without HEPA Filter
Ordering Information: Cleanroom Oven without Filters
Chamber Dimensions
W" x D" x H"
(mm)
Overall Dimensions
W" x D" x H"
(mm)
Volume
ft³
(m³)
L
Net Wt.
lbs.
(kg)
Ship. Wt.
lbs.
(kg)
Watts Amps VAC
50/60Hz
Thermo
Scientific
Part #
Cat. # Price
13 x 18 x 19.5
(330.2 x 457.2 x 495.3)
21 5/8 x 24 1/4 x 35
(549.3 x 616 x 889)
2.6 180
(82)
205
(93)
1900 15.8 120 3490M 3700-12 $ 7,691
Operating Specifications: Cleanroom Oven without Filters
Thermo
Scientific
Part #
Cat. # Rise Time
(Ambient to 200°C)
Load Rise Time*
Temp. @ 150°C
Maximum
Temp. °C
Control Uniformity
@ 100°C @ 200°C @ 100°C @ 200°C
3490M 3700-12 22 minutes 8 minutes 250 ± 0.1 ± 0.2 ± 1.0 ± 1.5
* After oven temperature is stabilized at 150°C, the oven was loaded with nine 4" (102 mm) wafer boats. Boats were evenly distributed in the work chamber. A thermocouple measured the wafer temperature in the center boat. Following values represent the time it took for the wafer temperature to reach 90% of set point. Note: Performance specifications were measured under controlled laboratory conditions. Your oven’s performance may be slightly different, depending on the application.

Class 100 Cleanroom Oven With HEPA Filter for Maximum contamination protection
Ordering Information: Cleanroom Oven with HEPA Filters
Chamber Dimensions
W" x D" x H"
(mm)
Overall Dimensions
W" x D" x H"
(mm)
Volume
ft³
(m³)
L
Net Wt.
lbs.
(kg)
Ship. Wt.
lbs.
(kg)
Watts Amps VAC
50/60Hz
Thermo
Scientific
Part #
Cat. # Price
14 x 18 x 19.5
(356 x 457 x 495)
26.625 x 24.25 x 35
(676 x 616 x889)
2.8
(0.8m³)
79.2
202
(91.8)
235
(106.8)
3100 12.9 240 3497M-1 3700-70
$ 10,163
Operating Specifications: Cleanroom Oven with HEPA Filters
Thermo
Scientific
Part #
Cat. # Rise Time
(Ambient to 90°C)
Recovery Time*
@ 90°C
Maximum
Temperature
Control
@ 90° C
Uniformity
@ 90° C
3497M-1 3700-70
11 minutes 22 seconds 250°C ± 0.2 ± 1.5
* After 1 minute, 90° door opening. Note: Performance specifications were measured under controlled laboratory conditions. Your oven’s performance may be slightly different, depending on the application.

Microprocessor Temperature Control Ensures Safe Operation and Repeatable Results

Microprocessor-based temperature controls and mechanical convection air-flow design ensure unsurpassed operating characteristics. A platinum RTD temperature sensor responds instantly to the load temperature, so the display value is an accurate reflection of the temperature of the oven’s contents. Digital controls guarantee repeatable conditions with every use.

The single-program PID microprocessor controller provides eight segments, ramp is adjustable from 0.01°C/min. and dwell from 0 to 9999 minutes. In case of primary control failure, an adjustable high limit safety thermostat will control the temperature to a few degrees above the original set point.

An indicator lamp alerts the user to any overtemperature condition.

All controls are mounted on a convenient drawer-style control panel, recessed and sheltered from spills, which allows easy access to internal parts.

Exclusive Air-Flow Engineering

These ovens feature an exclusive airflow pattern that assures you of unsurpassed temperature control and uniformity and quick recovery times. A stainless steel blower, driven by a constant speed induction motor, circulates air throughout the chamber.

Heated air is gently forced up both sides of the work chamber. It exits through openings in the sidewall plenums where it travels over the load toward the oven center. Airflow is then directed downward through the center of the chamber for reheating and recycling.

Durable Construction Ensures Long, Reliable Service Life

Ultra Clean Ovens are built to last. The attractive, white baked enamel finish and clean look of these units will add to the appearance of the most modern laboratory or production facility.

The interior walls are made of corrosion-resistant stainless steel. The bottom and sidewall plenums are also stainless steel. Four perforated stainless steel shelves adjustable on 1.75" (44 mm) centers are included with every unit. The oven utilizes delrin hinge pivots eliminating contamination due to metal contacting metal. Adjustable door hinge, positive lever-actuated door latch and silicone gasket assure an excellent seal between door and chamber.

Interior cleaning is a snap. Shelves, supports, and plenums are quickly removed and rounded interior corners speed the job along.

Exterior walls, finished with durable enamel, are constructed from cold rolled steel and reinforced at all stress points. 

Three inches of silica-based insulation, between the work chamber and exterior walls, help retain heat. Rigid backing prevents insulation from settling in the walls. The plug style door with stainless steel inner surface, one piece silicone gasket, and positive locking door latch, also prevent heat loss from the chamber. All these features add up to an oven with improved uniformity and control, lower operating costs, and minimal heat radiated to the surrounding environment. All models come equipped with 3 wire line cord and plug.

Additional standard features include an adjustable 2 inch (51 mm) diameter exhaust vent, a .125" NPT fitting for introducing inert gas or house air into the oven chamber, and fused electrical overload safeguards. A flowmeter and a 0.3 micron filter are included for purging with nitrogen only on units with HEPA filters.

These ovens are for sale in the U.S. only.

Stacking Racks
The Space Saver Stacking Racks are available for other Class 100 Cleanroom Oven models. Stacking Racks allow two ovens of the same size to be stacked for safe operation. A fan removes heat generated from the bottom oven, preventing damage to or malfunction of the top unit. Racks are not available for HEPA-filtered Ultra Clean Ovens. Operate on 120VAC, 50/60Hz.


Thermo Scientific
Part #
Cat. # Price

3485-2 3700-20 $ 650

Replacement HEPA Filters
For Ultra Clean Ovens

Overall dimensions: 17"W x 3.25"D x 17"H (432 mm x 83 mm x 432 mm)
Weight: 14 lbs. (6350 g.) net; 20 lbs. (9072 g) shipping

Thermo Scientific Part # Cat. # Price
3497 3700-72 $ 1,339
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